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/vufind/Search/Results?lookfor=%22Virtual+metrology%22&type=Subject&sort=year%2C+publishDateDaySort_date+desc%2C+id
/vufind/Search/Results?lookfor=%22Virtual+metrology%22&type=Subject&sort=year%2C+publishDateDaySort_date+desc%2C+id
Search /vufind/Search2/Results?lookfor=%22Virtual+metrology%22&type=Subject&sort=year%2C+publishDateDaySort_date+desc%2C+id
PubPharm (26)
1
Semi-Supervised Deep Kernel Active Learning for Material Removal Rate Prediction in Chemical Mechanical Planarization
enthalten in:
Sensors (Basel, Switzerland)
| 2023
von
Lv, C.
|
Huang, J.
|
Zhang, M.
| +2
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2
Semi-Supervised Deep Kernel Active Learning for Material Removal Rate Prediction in Chemical Mechanical Planarization
in:
Sensors
| 2023
von
Chunpu Lv
|
Jingwei Huang
|
Ming Zhang
| +2
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3
An improved virtual metrology method in chemical vapor deposition systems via multitask gaussian processes and adaptive active learning
enthalten in:
The international journal of advanced manufacturing technology
| 2022
von
Ji, S.
|
Dai, M.
|
Wen, H.
| +4
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4
An improved virtual metrology method in chemical vapor deposition systems via multitask gaussian processes and adaptive active learning
enthalten in:
The international journal of advanced manufacturing technology
| 2022
von
Ji, S.
|
Dai, M.
|
Wen, H.
| +4
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5
An improved virtual metrology method in chemical vapor deposition systems via multitask gaussian processes and adaptive active learning
enthalten in:
The international journal of advanced manufacturing technology
| 2022
von
Ji, S.
|
Dai, M.
|
Wen, H.
| +4
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6
Plasma information-based virtual metrology (PI-VM) and mass production process control
enthalten in:
Journal of the Korean Physical Society
| 2022
von
Park, S.
|
Seong, J.
|
Jang, Y.
| +12
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7
Plasma information-based virtual metrology (PI-VM) and mass production process control
enthalten in:
Journal of the Korean Physical Society
| 2022
von
Park, S.
|
Seong, J.
|
Jang, Y.
| +12
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8
Plasma information-based virtual metrology (PI-VM) and mass production process control
enthalten in:
Journal of the Korean Physical Society
| 2022
von
Park, S.
|
Seong, J.
|
Jang, Y.
| +12
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9
Virtual Metrology in Semiconductor Fabrication Foundry Using Deep Learning Neural Networks
in:
IEEE Access
| 2022
von
Tze Chiang Tin
|
Saw Chin Tan
|
Ching Kwang Lee
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10
Reference-based Virtual Metrology method with uncertainty evaluation for Material Removal Rate prediction based on Gaussian Process Regression
enthalten in:
The international journal of advanced manufacturing technology
| 2021
von
Cai, H.
|
Feng, J.
|
Yang, Q.
| +3
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The international journal of advanced manufactu...
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Thema
13
Virtual metrology
8
virtual metrology
3
APC (advanced process control)
3
Active learning
3
Adaptive learning
3
Advanced process control
3
CVD (chemical vapor deposition)
3
Chemical Mechanical Planarization
3
Chemical mechanical planarization
3
Chemical vapor deposition
3
Convolutional neural network
3
Electrical engineering. Electronics. Nuclear en...
3
Etching
3
FDC (fault detection and classification)
3
Gaussian Process Regression
3
Journal Article
3
Mass production
3
Materials Removal Rate
3
Maximum Mean Discrepancy
3
Multitask Gaussian process
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Erscheinungszeitraum
18
2020-
8
2010-2019
Erscheinungsjahr(e)
Von:
Bis:
Sprache
26
Englisch
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