Effect of the orientation polarization and texturing on nano-mechanical and piezoelectric properties of PZT (52/48) films
Abstract Ferroelectric (piezoelectric) Pb ($ Zr_{0.52} %$ Ti_{0.48} $) $ O_{3} $ (PZT) films were synthesized using an aerosol-assisted chemical vapor deposition technique on (111) Pt/Ti/$ SiO_{2} $/Si substrates. The optimum deposition temperature was 350 °C, followed by annealing at 650 °C for 1 h. Tetragonal perovskite phase and preferred orientation {0 0 1} in the PZT films were determined by two-dimensional grazing incidence diffraction using synchrotron X-ray radiation and nano-beam electron diffraction (NBED). The PZT film grains’ texture, represented by inverse pole representation, correlates with (0 0 1) and (1 1 1) orientations with approximate XRD peak distribution width of Ω ≈ 35°. The elastic-to-plastic transition of the piezoelectric-based structural deformation of the PZT films is represented by the pop-in, which marks the limit in the elastic behavior at the yield stress for which the material starts exhibiting permanent deformation, with the yield point being Y = 2.5 ± 0.7 GPa for the Pb ($ Zr_{0.52} %$ Ti_{0.48} $) $ O_{3} $ film. The hardness (H = 7.5 ± 0.16 GPa), elastic modulus (E = 126 ± 3 GPa), and scratching were evaluated at the nanoscale, using a nanoindentation technique. No delamination or cracks were observed near the residual scratching stage. The switching of piezoelectric domains and domain polarization process, as a function of films’ texture, in the representative Pb ($ Zr_{0.52} %$ Ti_{0.48} $) $ O_{3} $ films, were studied using Piezoresponse Force Microscopy (PFM). The values of the saturation polarization, remnant polarization, coercive field, and piezoelectric constant were Ps = 45 μC/$ cm^{2} $, Pr =30 μC/$ cm^{2} $, Ec = 22 kV/cm, and d33 = 137 pm/V, respectively. The local piezoelectric hysteresis loops and film nanostructure correlate with the polarization orientation..
Medienart: |
E-Artikel |
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Erscheinungsjahr: |
2023 |
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Erschienen: |
2023 |
Enthalten in: |
Zur Gesamtaufnahme - volume:129 |
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Enthalten in: |
Applied physics - 129(2023), 2 vom: 13. Jan. |
Sprache: |
Englisch |
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Beteiligte Personen: |
Ramos-Cano, C. J. [VerfasserIn] |
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Links: |
Volltext [lizenzpflichtig] |
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Themen: |
Aerosol-assisted chemical vapor deposition |
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Anmerkungen: |
© The Author(s), under exclusive licence to Springer-Verlag GmbH, DE part of Springer Nature 2023. Springer Nature or its licensor (e.g. a society or other partner) holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law. |
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doi: |
10.1007/s00339-022-06374-3 |
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funding: |
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Förderinstitution / Projekttitel: |
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PPN (Katalog-ID): |
SPR049420593 |
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520 | |a Abstract Ferroelectric (piezoelectric) Pb ($ Zr_{0.52} %$ Ti_{0.48} $) $ O_{3} $ (PZT) films were synthesized using an aerosol-assisted chemical vapor deposition technique on (111) Pt/Ti/$ SiO_{2} $/Si substrates. The optimum deposition temperature was 350 °C, followed by annealing at 650 °C for 1 h. Tetragonal perovskite phase and preferred orientation {0 0 1} in the PZT films were determined by two-dimensional grazing incidence diffraction using synchrotron X-ray radiation and nano-beam electron diffraction (NBED). The PZT film grains’ texture, represented by inverse pole representation, correlates with (0 0 1) and (1 1 1) orientations with approximate XRD peak distribution width of Ω ≈ 35°. The elastic-to-plastic transition of the piezoelectric-based structural deformation of the PZT films is represented by the pop-in, which marks the limit in the elastic behavior at the yield stress for which the material starts exhibiting permanent deformation, with the yield point being Y = 2.5 ± 0.7 GPa for the Pb ($ Zr_{0.52} %$ Ti_{0.48} $) $ O_{3} $ film. The hardness (H = 7.5 ± 0.16 GPa), elastic modulus (E = 126 ± 3 GPa), and scratching were evaluated at the nanoscale, using a nanoindentation technique. No delamination or cracks were observed near the residual scratching stage. The switching of piezoelectric domains and domain polarization process, as a function of films’ texture, in the representative Pb ($ Zr_{0.52} %$ Ti_{0.48} $) $ O_{3} $ films, were studied using Piezoresponse Force Microscopy (PFM). The values of the saturation polarization, remnant polarization, coercive field, and piezoelectric constant were Ps = 45 μC/$ cm^{2} $, Pr =30 μC/$ cm^{2} $, Ec = 22 kV/cm, and d33 = 137 pm/V, respectively. The local piezoelectric hysteresis loops and film nanostructure correlate with the polarization orientation. | ||
650 | 4 | |a Ferroelasticity |7 (dpeaa)DE-He213 | |
650 | 4 | |a Nanolithography |7 (dpeaa)DE-He213 | |
650 | 4 | |a Ferroelectricity |7 (dpeaa)DE-He213 | |
650 | 4 | |a Piezoelectricity |7 (dpeaa)DE-He213 | |
650 | 4 | |a Nanoindentation |7 (dpeaa)DE-He213 | |
650 | 4 | |a Aerosol-assisted chemical vapor deposition |7 (dpeaa)DE-He213 | |
700 | 1 | |a Miki-Yoshida, M. |4 aut | |
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700 | 1 | |a Mercader-Trejo, F. |4 aut | |
700 | 1 | |a Fuentes-Cobas, L. |4 aut | |
700 | 1 | |a Auciello, O. |4 aut | |
700 | 1 | |a Hurtado-Macías, A. |4 aut | |
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