Effect of the orientation polarization and texturing on nano-mechanical and piezoelectric properties of PZT (52/48) films
Abstract Ferroelectric (piezoelectric) Pb ($ Zr_{0.52} $$ Ti_{0.48} $) $ O_{3} $ (PZT) films were synthesized using an aerosol-assisted chemical vapor deposition technique on (111) Pt/Ti/$ SiO_{2} $/Si substrates. The optimum deposition temperature was 350 °C, followed by annealing at 650 °C for 1 h. Tetragonal perovskite phase and preferred orientation {0 0 1} in the PZT films were determined by two-dimensional grazing incidence diffraction using synchrotron X-ray radiation and nano-beam electron diffraction (NBED). The PZT film grains’ texture, represented by inverse pole representation, correlates with (0 0 1) and (1 1 1) orientations with approximate XRD peak distribution width of Ω ≈ 35°. The elastic-to-plastic transition of the piezoelectric-based structural deformation of the PZT films is represented by the pop-in, which marks the limit in the elastic behavior at the yield stress for which the material starts exhibiting permanent deformation, with the yield point being Y = 2.5 ± 0.7 GPa for the Pb ($ Zr_{0.52} $$ Ti_{0.48} $) $ O_{3} $ film. The hardness (H = 7.5 ± 0.16 GPa), elastic modulus (E = 126 ± 3 GPa), and scratching were evaluated at the nanoscale, using a nanoindentation technique. No delamination or cracks were observed near the residual scratching stage. The switching of piezoelectric domains and domain polarization process, as a function of films’ texture, in the representative Pb ($ Zr_{0.52} $$ Ti_{0.48} $) $ O_{3} $ films, were studied using Piezoresponse Force Microscopy (PFM). The values of the saturation polarization, remnant polarization, coercive field, and piezoelectric constant were Ps = 45 μC/$ cm^{2} $, Pr =30 μC/$ cm^{2} $, Ec = 22 kV/cm, and d33 = 137 pm/V, respectively. The local piezoelectric hysteresis loops and film nanostructure correlate with the polarization orientation..
| Medienart: |
Artikel |
|---|
| Erscheinungsjahr: |
2023 |
|---|---|
| Erschienen: |
2023 |
| Enthalten in: |
Zur Gesamtaufnahme - volume:129 |
|---|---|
| Enthalten in: |
Applied physics. A, Materials science & processing - 129(2023), 2 vom: 13. Jan. |
| Sprache: |
Englisch |
|---|
| Beteiligte Personen: |
Ramos-Cano, C. J. [VerfasserIn] |
|---|
| Links: |
Volltext [lizenzpflichtig] |
|---|
| Themen: |
Aerosol-assisted chemical vapor deposition |
|---|
| RVK: |
|---|
| Anmerkungen: |
© The Author(s), under exclusive licence to Springer-Verlag GmbH, DE part of Springer Nature 2023. Springer Nature or its licensor (e.g. a society or other partner) holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law. |
|---|
| doi: |
10.1007/s00339-022-06374-3 |
|---|
| funding: |
|
|---|---|
| Förderinstitution / Projekttitel: |
|
| PPN (Katalog-ID): |
OLC2080301594 |
|---|
| LEADER | 01000caa a22002652 4500 | ||
|---|---|---|---|
| 001 | OLC2080301594 | ||
| 003 | DE-627 | ||
| 005 | 20230511103040.0 | ||
| 007 | tu | ||
| 008 | 230131s2023 xx ||||| 00| ||eng c | ||
| 024 | 7 | |a 10.1007/s00339-022-06374-3 |2 doi | |
| 035 | |a (DE-627)OLC2080301594 | ||
| 035 | |a (DE-He213)s00339-022-06374-3-p | ||
| 040 | |a DE-627 |b ger |c DE-627 |e rakwb | ||
| 041 | |a eng | ||
| 082 | 0 | 4 | |a 530 |a 620 |q VZ |
| 082 | 0 | 4 | |a 530 |q VZ |
| 084 | |a UA 9001.A |q VZ |2 rvk | ||
| 100 | 1 | |a Ramos-Cano, C. J. |e verfasserin |4 aut | |
| 245 | 1 | 0 | |a Effect of the orientation polarization and texturing on nano-mechanical and piezoelectric properties of PZT (52/48) films |
| 264 | 1 | |c 2023 | |
| 336 | |a Text |b txt |2 rdacontent | ||
| 337 | |a ohne Hilfsmittel zu benutzen |b n |2 rdamedia | ||
| 338 | |a Band |b nc |2 rdacarrier | ||
| 500 | |a © The Author(s), under exclusive licence to Springer-Verlag GmbH, DE part of Springer Nature 2023. Springer Nature or its licensor (e.g. a society or other partner) holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law. | ||
| 520 | |a Abstract Ferroelectric (piezoelectric) Pb ($ Zr_{0.52} $$ Ti_{0.48} $) $ O_{3} $ (PZT) films were synthesized using an aerosol-assisted chemical vapor deposition technique on (111) Pt/Ti/$ SiO_{2} $/Si substrates. The optimum deposition temperature was 350 °C, followed by annealing at 650 °C for 1 h. Tetragonal perovskite phase and preferred orientation {0 0 1} in the PZT films were determined by two-dimensional grazing incidence diffraction using synchrotron X-ray radiation and nano-beam electron diffraction (NBED). The PZT film grains’ texture, represented by inverse pole representation, correlates with (0 0 1) and (1 1 1) orientations with approximate XRD peak distribution width of Ω ≈ 35°. The elastic-to-plastic transition of the piezoelectric-based structural deformation of the PZT films is represented by the pop-in, which marks the limit in the elastic behavior at the yield stress for which the material starts exhibiting permanent deformation, with the yield point being Y = 2.5 ± 0.7 GPa for the Pb ($ Zr_{0.52} $$ Ti_{0.48} $) $ O_{3} $ film. The hardness (H = 7.5 ± 0.16 GPa), elastic modulus (E = 126 ± 3 GPa), and scratching were evaluated at the nanoscale, using a nanoindentation technique. No delamination or cracks were observed near the residual scratching stage. The switching of piezoelectric domains and domain polarization process, as a function of films’ texture, in the representative Pb ($ Zr_{0.52} $$ Ti_{0.48} $) $ O_{3} $ films, were studied using Piezoresponse Force Microscopy (PFM). The values of the saturation polarization, remnant polarization, coercive field, and piezoelectric constant were Ps = 45 μC/$ cm^{2} $, Pr =30 μC/$ cm^{2} $, Ec = 22 kV/cm, and d33 = 137 pm/V, respectively. The local piezoelectric hysteresis loops and film nanostructure correlate with the polarization orientation. | ||
| 650 | 4 | |a Ferroelasticity | |
| 650 | 4 | |a Nanolithography | |
| 650 | 4 | |a Ferroelectricity | |
| 650 | 4 | |a Piezoelectricity | |
| 650 | 4 | |a Nanoindentation | |
| 650 | 4 | |a Aerosol-assisted chemical vapor deposition | |
| 700 | 1 | |a Miki-Yoshida, M. |4 aut | |
| 700 | 1 | |a Herrera-Basurto, R. |4 aut | |
| 700 | 1 | |a Mercader-Trejo, F. |4 aut | |
| 700 | 1 | |a Fuentes-Cobas, L. |4 aut | |
| 700 | 1 | |a Auciello, O. |4 aut | |
| 700 | 1 | |a Hurtado-Macías, A. |0 (orcid)0000-0002-0406-3776 |4 aut | |
| 773 | 0 | 8 | |i Enthalten in |t Applied physics. A, Materials science & processing |d Springer Berlin Heidelberg, 1981 |g 129(2023), 2 vom: 13. Jan. |w (DE-627)129861340 |w (DE-600)283365-7 |w (DE-576)015171930 |x 0947-8396 |7 nnns |
| 773 | 1 | 8 | |g volume:129 |g year:2023 |g number:2 |g day:13 |g month:01 |
| 856 | 4 | 1 | |u https://doi.org/10.1007/s00339-022-06374-3 |z lizenzpflichtig |3 Volltext |
| 912 | |a GBV_USEFLAG_A | ||
| 912 | |a SYSFLAG_A | ||
| 912 | |a GBV_OLC | ||
| 912 | |a SSG-OLC-TEC | ||
| 912 | |a SSG-OLC-PHY | ||
| 912 | |a SSG-OLC-PHA | ||
| 912 | |a SSG-OLC-DE-84 | ||
| 912 | |a GBV_ILN_2018 | ||
| 912 | |a GBV_ILN_4277 | ||
| 936 | r | v | |a UA 9001.A |
| 951 | |a AR | ||
| 952 | |d 129 |j 2023 |e 2 |b 13 |c 01 | ||