Radiation tolerance of Si1−yCy source/drain n-type metal oxide semiconductor field effect transistors with different carbon concentrations
Medienart: |
Artikel |
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Erscheinungsjahr: |
2014 |
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Erschienen: |
2014 |
Enthalten in: |
Zur Gesamtaufnahme - volume:557 |
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Enthalten in: |
Thin solid films - 557(2014) vom: 30. Apr., Seite 307-310 |
Beteiligte Personen: |
Nakashima, Toshiyuki [VerfasserIn] |
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Umfang: |
4 |
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Förderinstitution / Projekttitel: |
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PPN (Katalog-ID): |
OLC1939668115 |
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245 | 1 | 0 | |a Radiation tolerance of Si1−yCy source/drain n-type metal oxide semiconductor field effect transistors with different carbon concentrations |
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