Properties of amorphous silicon thin films synthesized by reactive particle beam assisted chemical vapor deposition
| Medienart: |
Artikel |
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| Erscheinungsjahr: |
2010 |
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| Erschienen: |
2010 |
| Enthalten in: |
Zur Gesamtaufnahme - volume:518 |
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| Enthalten in: |
Thin solid films - 518(2010), 24 vom: 1. Okt., Seite 7372-7377 |
| Beteiligte Personen: |
Choi, Sun Gyu [VerfasserIn] |
|---|
| Umfang: |
5 |
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| Förderinstitution / Projekttitel: |
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| PPN (Katalog-ID): |
OLC1849397562 |
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| 245 | 1 | 0 | |a Properties of amorphous silicon thin films synthesized by reactive particle beam assisted chemical vapor deposition |
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| 700 | 1 | |a Park, Hyung-Ho |4 oth | |
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