A fast-switching, low-power pneumatic microvalve with electrostatic actuation made by silicon micromachining
| Medienart: |
Artikel |
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| Erscheinungsjahr: |
1998 |
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| Erschienen: |
1998 |
| Enthalten in: |
Zur Gesamtaufnahme - volume:30 |
|---|---|
| Enthalten in: |
American laboratory - 30(1998), 6, Seite 17-18 |
| Beteiligte Personen: |
Kluge, S. [VerfasserIn] |
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| BKL: |
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| Umfang: |
2 |
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| Förderinstitution / Projekttitel: |
|
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| PPN (Katalog-ID): |
OLC1531545068 |
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| 245 | 1 | 2 | |a A fast-switching, low-power pneumatic microvalve with electrostatic actuation made by silicon micromachining |
| 264 | 1 | |c 1998 | |
| 300 | |a 2 | ||
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