Ultrathin Crystalline Silicon Nano and Micro Membranes with High Areal Density for Low-Cost Flexible Electronics
© 2023 Wiley-VCH GmbH..
Ultrathin crystalline silicon is widely used as an active material for high-performance, flexible, and stretchable electronics, from simple passive and active components to complex integrated circuits, due to its excellent electrical and mechanical properties. However, in contrast to conventional silicon wafer-based devices, ultrathin crystalline silicon-based electronics require an expensive and rather complicated fabrication process. Although silicon-on-insulator (SOI) wafers are commonly used to obtain a single layer of crystalline silicon, they are costly and difficult to process. Therefore, as an alternative to SOI wafers-based thin layers, here, a simple transfer method is proposed for printing ultrathin multiple crystalline silicon sheets with thicknesses between 300 nm to 13 µm and high areal density (>90%) from a single mother wafer. Theoretically, the silicon nano/micro membrane can be generated until the mother wafer is completely consumed. In addition, the electronic applications of silicon membranes are successfully demonstrated through the fabrication of a flexible solar cell and flexible NMOS transistor arrays.
| Medienart: |
E-Artikel |
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| Erscheinungsjahr: |
2023 |
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| Erschienen: |
2023 |
| Enthalten in: |
Zur Gesamtaufnahme - volume:19 |
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| Enthalten in: |
Small (Weinheim an der Bergstrasse, Germany) - 19(2023), 39 vom: 28. Sept., Seite e2302597 |
| Sprache: |
Englisch |
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| Beteiligte Personen: |
Lee, Ju Young [VerfasserIn] |
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| Links: |
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| Themen: |
Flexible electronics |
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| Anmerkungen: |
Date Revised 20.10.2023 published: Print-Electronic Citation Status PubMed-not-MEDLINE |
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| doi: |
10.1002/smll.202302597 |
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| funding: |
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| Förderinstitution / Projekttitel: |
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| PPN (Katalog-ID): |
NLM357484584 |
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| LEADER | 01000naa a22002652 4500 | ||
|---|---|---|---|
| 001 | NLM357484584 | ||
| 003 | DE-627 | ||
| 005 | 20231226072706.0 | ||
| 007 | cr uuu---uuuuu | ||
| 008 | 231226s2023 xx |||||o 00| ||eng c | ||
| 024 | 7 | |a 10.1002/smll.202302597 |2 doi | |
| 028 | 5 | 2 | |a pubmed24n1191.xml |
| 035 | |a (DE-627)NLM357484584 | ||
| 035 | |a (NLM)37246255 | ||
| 040 | |a DE-627 |b ger |c DE-627 |e rakwb | ||
| 041 | |a eng | ||
| 100 | 1 | |a Lee, Ju Young |e verfasserin |4 aut | |
| 245 | 1 | 0 | |a Ultrathin Crystalline Silicon Nano and Micro Membranes with High Areal Density for Low-Cost Flexible Electronics |
| 264 | 1 | |c 2023 | |
| 336 | |a Text |b txt |2 rdacontent | ||
| 337 | |a ƒaComputermedien |b c |2 rdamedia | ||
| 338 | |a ƒa Online-Ressource |b cr |2 rdacarrier | ||
| 500 | |a Date Revised 20.10.2023 | ||
| 500 | |a published: Print-Electronic | ||
| 500 | |a Citation Status PubMed-not-MEDLINE | ||
| 520 | |a © 2023 Wiley-VCH GmbH. | ||
| 520 | |a Ultrathin crystalline silicon is widely used as an active material for high-performance, flexible, and stretchable electronics, from simple passive and active components to complex integrated circuits, due to its excellent electrical and mechanical properties. However, in contrast to conventional silicon wafer-based devices, ultrathin crystalline silicon-based electronics require an expensive and rather complicated fabrication process. Although silicon-on-insulator (SOI) wafers are commonly used to obtain a single layer of crystalline silicon, they are costly and difficult to process. Therefore, as an alternative to SOI wafers-based thin layers, here, a simple transfer method is proposed for printing ultrathin multiple crystalline silicon sheets with thicknesses between 300 nm to 13 µm and high areal density (>90%) from a single mother wafer. Theoretically, the silicon nano/micro membrane can be generated until the mother wafer is completely consumed. In addition, the electronic applications of silicon membranes are successfully demonstrated through the fabrication of a flexible solar cell and flexible NMOS transistor arrays | ||
| 650 | 4 | |a Journal Article | |
| 650 | 4 | |a flexible electronics | |
| 650 | 4 | |a reusable silicon | |
| 650 | 4 | |a semiconductor electronics applications | |
| 650 | 4 | |a silicon nano/micro membrane sheet transfer | |
| 700 | 1 | |a Shin, Jongwoon |e verfasserin |4 aut | |
| 700 | 1 | |a Kim, Kyubeen |e verfasserin |4 aut | |
| 700 | 1 | |a Ju, Jeong Eun |e verfasserin |4 aut | |
| 700 | 1 | |a Dutta, Ankan |e verfasserin |4 aut | |
| 700 | 1 | |a Kim, Tae Soo |e verfasserin |4 aut | |
| 700 | 1 | |a Cho, Young Uk |e verfasserin |4 aut | |
| 700 | 1 | |a Kim, Taemin |e verfasserin |4 aut | |
| 700 | 1 | |a Hu, Luhing |e verfasserin |4 aut | |
| 700 | 1 | |a Min, Won Kyung |e verfasserin |4 aut | |
| 700 | 1 | |a Jung, Hyun-Suh |e verfasserin |4 aut | |
| 700 | 1 | |a Park, Young Sun |e verfasserin |4 aut | |
| 700 | 1 | |a Won, Sang Min |e verfasserin |4 aut | |
| 700 | 1 | |a Yeo, Woon-Hong |e verfasserin |4 aut | |
| 700 | 1 | |a Moon, Jooho |e verfasserin |4 aut | |
| 700 | 1 | |a Khang, Dahl-Young |e verfasserin |4 aut | |
| 700 | 1 | |a Kim, Hyun Jae |e verfasserin |4 aut | |
| 700 | 1 | |a Ahn, Jong-Hyun |e verfasserin |4 aut | |
| 700 | 1 | |a Cheng, Huanyu |e verfasserin |4 aut | |
| 700 | 1 | |a Yu, Ki Jun |e verfasserin |4 aut | |
| 700 | 1 | |a Rogers, John A |e verfasserin |4 aut | |
| 773 | 0 | 8 | |i Enthalten in |t Small (Weinheim an der Bergstrasse, Germany) |d 2005 |g 19(2023), 39 vom: 28. Sept., Seite e2302597 |w (DE-627)NLM167400452 |x 1613-6829 |7 nnns |
| 773 | 1 | 8 | |g volume:19 |g year:2023 |g number:39 |g day:28 |g month:09 |g pages:e2302597 |
| 856 | 4 | 0 | |u http://dx.doi.org/10.1002/smll.202302597 |3 Volltext |
| 912 | |a GBV_USEFLAG_A | ||
| 912 | |a GBV_NLM | ||
| 951 | |a AR | ||
| 952 | |d 19 |j 2023 |e 39 |b 28 |c 09 |h e2302597 | ||