Review of Piezoelectric Micromachined Ultrasonic Transducers for Rangefinders

Piezoelectric micromachined ultrasonic transducer (pMUT) rangefinders have been rapidly developed in the last decade. With high output pressure to enable long-range detection and low power consumption (16 μW for over 1 m range detection has been reported), pMUT rangefinders have drawn extensive attention to mobile range-finding. pMUT rangefinders with different strategies to enhance range-finding performance have been developed, including the utilization of pMUT arrays, advanced device structures, and novel piezoelectric materials, and the improvements of range-finding methods. This work briefly introduces the working principle of pMUT rangefinders and then provides an extensive overview of recent advancements that improve the performance of pMUT rangefinders, including advanced pMUT devices and range-finding methods used in pMUT rangefinder systems. Finally, several derivative systems of pMUT rangefinders enabling pMUT rangefinders for broader applications are presented.

Medienart:

E-Artikel

Erscheinungsjahr:

2023

Erschienen:

2023

Enthalten in:

Zur Gesamtaufnahme - volume:14

Enthalten in:

Micromachines - 14(2023), 2 vom: 02. Feb.

Sprache:

Englisch

Beteiligte Personen:

Pan, Jiong [VerfasserIn]
Bai, Chenyu [VerfasserIn]
Zheng, Qincheng [VerfasserIn]
Xie, Huikai [VerfasserIn]

Links:

Volltext

Themen:

Journal Article
MEMS
Microelectromechanical system
PMUT
Piezoelectric
Range-finding
Rangefinder
Review

Anmerkungen:

Date Revised 27.02.2023

published: Electronic

Citation Status PubMed-not-MEDLINE

doi:

10.3390/mi14020374

funding:

Förderinstitution / Projekttitel:

PPN (Katalog-ID):

NLM353442038