Lead-Free LiNbO3 Thick Film MEMS Kinetic Cantilever Beam Sensor/Energy Harvester
In this paper, we present integrated lead-free energy converters based on a suitable MEMS fabrication process with an embedded layer of LiNbO3. The fabrication technology has been developed to realize micromachined self-generating transducers to convert kinetic energy into electrical energy. The process proposed presents several interesting features with the possibility of realizing smaller scale devices, integrated systems, miniaturized mechanical and electromechanical sensors, and transducers with an active layer used as the main conversion element. When the system is fabricated in the typical cantilever configuration, it can produce a peak-to-peak open-circuit output voltage of 0.208 V, due to flexural deformation, and a power density of 1.9 nW·mm-3·g-2 at resonance, with values of acceleration and frequency of 2.4 g and 4096 Hz, respectively. The electromechanical transduction capability is exploited for sensing and power generation/energy harvesting applications. Theoretical considerations, simulations, numerical analyses, and experiments are presented to show the proposed LiNbO3-based MEMS fabrication process suitability. This paper presents substantial contributions to the state-of-the-art, proposing an integral solution regarding the design, modelling, simulation, realization, and characterization of a novel transducer.
| Medienart: |
E-Artikel |
|---|
| Erscheinungsjahr: |
2022 |
|---|---|
| Erschienen: |
2022 |
| Enthalten in: |
Zur Gesamtaufnahme - volume:22 |
|---|---|
| Enthalten in: |
Sensors (Basel, Switzerland) - 22(2022), 2 vom: 12. Jan. |
| Sprache: |
Englisch |
|---|
| Beteiligte Personen: |
Barrientos, Gabriel [VerfasserIn] |
|---|
| Links: |
|---|
| Themen: |
Energy converters |
|---|
| Anmerkungen: |
Date Revised 28.01.2022 published: Electronic Citation Status PubMed-not-MEDLINE |
|---|
| doi: |
10.3390/s22020559 |
|---|
| funding: |
|
|---|---|
| Förderinstitution / Projekttitel: |
|
| PPN (Katalog-ID): |
NLM335971121 |
|---|
| LEADER | 01000naa a22002652 4500 | ||
|---|---|---|---|
| 001 | NLM335971121 | ||
| 003 | DE-627 | ||
| 005 | 20231225231054.0 | ||
| 007 | cr uuu---uuuuu | ||
| 008 | 231225s2022 xx |||||o 00| ||eng c | ||
| 024 | 7 | |a 10.3390/s22020559 |2 doi | |
| 028 | 5 | 2 | |a pubmed24n1119.xml |
| 035 | |a (DE-627)NLM335971121 | ||
| 035 | |a (NLM)35062520 | ||
| 035 | |a (PII)559 | ||
| 040 | |a DE-627 |b ger |c DE-627 |e rakwb | ||
| 041 | |a eng | ||
| 100 | 1 | |a Barrientos, Gabriel |e verfasserin |4 aut | |
| 245 | 1 | 0 | |a Lead-Free LiNbO3 Thick Film MEMS Kinetic Cantilever Beam Sensor/Energy Harvester |
| 264 | 1 | |c 2022 | |
| 336 | |a Text |b txt |2 rdacontent | ||
| 337 | |a ƒaComputermedien |b c |2 rdamedia | ||
| 338 | |a ƒa Online-Ressource |b cr |2 rdacarrier | ||
| 500 | |a Date Revised 28.01.2022 | ||
| 500 | |a published: Electronic | ||
| 500 | |a Citation Status PubMed-not-MEDLINE | ||
| 520 | |a In this paper, we present integrated lead-free energy converters based on a suitable MEMS fabrication process with an embedded layer of LiNbO3. The fabrication technology has been developed to realize micromachined self-generating transducers to convert kinetic energy into electrical energy. The process proposed presents several interesting features with the possibility of realizing smaller scale devices, integrated systems, miniaturized mechanical and electromechanical sensors, and transducers with an active layer used as the main conversion element. When the system is fabricated in the typical cantilever configuration, it can produce a peak-to-peak open-circuit output voltage of 0.208 V, due to flexural deformation, and a power density of 1.9 nW·mm-3·g-2 at resonance, with values of acceleration and frequency of 2.4 g and 4096 Hz, respectively. The electromechanical transduction capability is exploited for sensing and power generation/energy harvesting applications. Theoretical considerations, simulations, numerical analyses, and experiments are presented to show the proposed LiNbO3-based MEMS fabrication process suitability. This paper presents substantial contributions to the state-of-the-art, proposing an integral solution regarding the design, modelling, simulation, realization, and characterization of a novel transducer | ||
| 650 | 4 | |a Journal Article | |
| 650 | 4 | |a LiNbO3 | |
| 650 | 4 | |a MEMS process | |
| 650 | 4 | |a energy converters | |
| 650 | 4 | |a lead-free transducers | |
| 700 | 1 | |a Clementi, Giacomo |e verfasserin |4 aut | |
| 700 | 1 | |a Trigona, Carlo |e verfasserin |4 aut | |
| 700 | 1 | |a Ouhabaz, Merieme |e verfasserin |4 aut | |
| 700 | 1 | |a Gauthier-Manuel, Ludovic |e verfasserin |4 aut | |
| 700 | 1 | |a Belharet, Djaffar |e verfasserin |4 aut | |
| 700 | 1 | |a Margueron, Samuel |e verfasserin |4 aut | |
| 700 | 1 | |a Bartasyte, Ausrine |e verfasserin |4 aut | |
| 700 | 1 | |a Malandrino, Graziella |e verfasserin |4 aut | |
| 700 | 1 | |a Baglio, Salvatore |e verfasserin |4 aut | |
| 773 | 0 | 8 | |i Enthalten in |t Sensors (Basel, Switzerland) |d 2007 |g 22(2022), 2 vom: 12. Jan. |w (DE-627)NLM187985170 |x 1424-8220 |7 nnns |
| 773 | 1 | 8 | |g volume:22 |g year:2022 |g number:2 |g day:12 |g month:01 |
| 856 | 4 | 0 | |u http://dx.doi.org/10.3390/s22020559 |3 Volltext |
| 912 | |a GBV_USEFLAG_A | ||
| 912 | |a GBV_NLM | ||
| 951 | |a AR | ||
| 952 | |d 22 |j 2022 |e 2 |b 12 |c 01 | ||