Surface Morphology and Microstructure Evolution of Single Crystal Diamond during Different Homoepitaxial Growth Stages
Homoepitaxial growth of step-flow single crystal diamond was performed by microwave plasma chemical vapor deposition system on high-pressure high-temperature diamond substrate. A coarse surface morphology with isolated particles was firstly deposited on diamond substrate as an interlayer under hillock growth model. Then, the growth model was changed to step-flow growth model for growing step-flow single crystal diamond layer on this hillock interlayer. Furthermore, the surface morphology evolution, cross-section and surface microstructure, and crystal quality of grown diamond were evaluated by scanning electron microscopy, high-resolution transmission electron microcopy, and Raman and photoluminescence spectroscopy. It was found that the surface morphology varied with deposition time under step-flow growth parameters. The cross-section topography exhibited obvious inhomogeneity in crystal structure. Additionally, the diamond growth mechanism from the microscopic point of view was revealed to illustrate the morphological and structural evolution.
| Medienart: |
E-Artikel |
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| Erscheinungsjahr: |
2021 |
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| Erschienen: |
2021 |
| Enthalten in: |
Zur Gesamtaufnahme - volume:14 |
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| Enthalten in: |
Materials (Basel, Switzerland) - 14(2021), 20 vom: 11. Okt. |
| Sprache: |
Englisch |
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| Beteiligte Personen: |
Shao, Guoqing [VerfasserIn] |
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| Links: |
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| Themen: |
Crystal quality |
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| Anmerkungen: |
Date Revised 26.10.2021 published: Electronic Citation Status PubMed-not-MEDLINE |
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| doi: |
10.3390/ma14205964 |
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| funding: |
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| Förderinstitution / Projekttitel: |
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| PPN (Katalog-ID): |
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| 100 | 1 | |a Shao, Guoqing |e verfasserin |4 aut | |
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| 500 | |a published: Electronic | ||
| 500 | |a Citation Status PubMed-not-MEDLINE | ||
| 520 | |a Homoepitaxial growth of step-flow single crystal diamond was performed by microwave plasma chemical vapor deposition system on high-pressure high-temperature diamond substrate. A coarse surface morphology with isolated particles was firstly deposited on diamond substrate as an interlayer under hillock growth model. Then, the growth model was changed to step-flow growth model for growing step-flow single crystal diamond layer on this hillock interlayer. Furthermore, the surface morphology evolution, cross-section and surface microstructure, and crystal quality of grown diamond were evaluated by scanning electron microscopy, high-resolution transmission electron microcopy, and Raman and photoluminescence spectroscopy. It was found that the surface morphology varied with deposition time under step-flow growth parameters. The cross-section topography exhibited obvious inhomogeneity in crystal structure. Additionally, the diamond growth mechanism from the microscopic point of view was revealed to illustrate the morphological and structural evolution | ||
| 650 | 4 | |a Journal Article | |
| 650 | 4 | |a crystal quality | |
| 650 | 4 | |a hillock growth | |
| 650 | 4 | |a microstructure | |
| 650 | 4 | |a step-flow growth | |
| 650 | 4 | |a surface morphology | |
| 700 | 1 | |a Wang, Juan |e verfasserin |4 aut | |
| 700 | 1 | |a Zhang, Shumiao |e verfasserin |4 aut | |
| 700 | 1 | |a Wang, Yanfeng |e verfasserin |4 aut | |
| 700 | 1 | |a Wang, Wei |e verfasserin |4 aut | |
| 700 | 1 | |a Wang, Hong-Xing |e verfasserin |4 aut | |
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