Direct-coupled micro-magnetometer with Y-Ba-Cu-O nano-slit SQUID fabricated with a focused helium ion beam
Direct write patterning of high-transition temperature (high-T C) superconducting oxide thin films with a focused helium ion beam is a formidable approach for the scaling of high-T C circuit feature sizes down to the nanoscale. In this letter, we report using this technique to create a sensitive micro superconducting quantum interference device (SQUID) magnetometer with a sensing area of about 100 × 100 μm2. The device is fabricated from a single 35-nm thick YBa2Cu3O7- δ film. A flux concentrating pick-up loop is directly coupled to a 10 nm × 20 μm nano-slit SQUID. The SQUID is defined entirely by helium ion irradiation from a gas field ion source. The irradiation converts the superconductor to an insulator, and no material is milled away or etched. In this manner, a very narrow non-superconducting nano-slit is created entirely within the plane of the film. The narrow slit dimension allows for maximization of the coupling to the field concentrator. Electrical measurements reveal a large 0.35 mV modulation with a magnetic field. We measure a white noise level of 2 μΦ0/Hz1∕2. The field noise of the magnetometer is 4 pT/Hz1∕2 at 4.2 K.
| Medienart: |
E-Artikel |
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| Erscheinungsjahr: |
2018 |
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| Erschienen: |
2018 |
| Enthalten in: |
Zur Gesamtaufnahme - volume:113 |
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| Enthalten in: |
Applied physics letters - 113(2018), 16 vom: 15. Okt., Seite 162602 |
| Sprache: |
Englisch |
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| Beteiligte Personen: |
Cho, Ethan Y [VerfasserIn] |
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| Links: |
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| Anmerkungen: |
Date Revised 28.09.2023 published: Print Citation Status PubMed-not-MEDLINE |
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| doi: |
10.1063/1.5048776 |
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| funding: |
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| Förderinstitution / Projekttitel: |
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| PPN (Katalog-ID): |
NLM28998131X |
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| 245 | 1 | 0 | |a Direct-coupled micro-magnetometer with Y-Ba-Cu-O nano-slit SQUID fabricated with a focused helium ion beam |
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| 500 | |a Date Revised 28.09.2023 | ||
| 500 | |a published: Print | ||
| 500 | |a Citation Status PubMed-not-MEDLINE | ||
| 520 | |a Direct write patterning of high-transition temperature (high-T C) superconducting oxide thin films with a focused helium ion beam is a formidable approach for the scaling of high-T C circuit feature sizes down to the nanoscale. In this letter, we report using this technique to create a sensitive micro superconducting quantum interference device (SQUID) magnetometer with a sensing area of about 100 × 100 μm2. The device is fabricated from a single 35-nm thick YBa2Cu3O7- δ film. A flux concentrating pick-up loop is directly coupled to a 10 nm × 20 μm nano-slit SQUID. The SQUID is defined entirely by helium ion irradiation from a gas field ion source. The irradiation converts the superconductor to an insulator, and no material is milled away or etched. In this manner, a very narrow non-superconducting nano-slit is created entirely within the plane of the film. The narrow slit dimension allows for maximization of the coupling to the field concentrator. Electrical measurements reveal a large 0.35 mV modulation with a magnetic field. We measure a white noise level of 2 μΦ0/Hz1∕2. The field noise of the magnetometer is 4 pT/Hz1∕2 at 4.2 K | ||
| 650 | 4 | |a Journal Article | |
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| 700 | 1 | |a LeFebvre, Jay C |e verfasserin |4 aut | |
| 700 | 1 | |a Zhou, Yuchao W |e verfasserin |4 aut | |
| 700 | 1 | |a Dynes, R C |e verfasserin |4 aut | |
| 700 | 1 | |a Cybart, Shane A |e verfasserin |4 aut | |
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