Study on Strain Detection with Si Based on Bicyclic Cascade Optical Microring Resonator
Optical micro-ring resonator prepared on Silicon-On-Insulator (SOI) has high sensitivity, small size and low mode volume. Its high sensitivity has been widely applied to the optical information transmission and inertial navigation devices field, while it is rarely applied in the testing of Mechanics. This paper presents a cantilever stress/strain gauge with an optical microring resonator. It is proposed the using of radius change of ring waveguide for the sensing element. When external stress is put on the structure, the radius of the SOI ring waveguide will be subjected to variation, which causes the optical resonant parameters to change. This ultimately leads to a red-shift of resonant spectrum, and shows the excellent characteristics of the structure's stress/strain sensitivity. Designed a bicyclic cascade embedded optical micro-cavity structure, which was prepared by employing MEMS lithography and ICP etching process. The characteristic of stress/strain sensitivity was calculated theoretically. Two values of 0.185 pm x kPa(-1) and 18.04 pm x microstrain(-1) were obtained experimentally, which also was verified by theoretical simulations. Comparing with the single-loop micro-cavity structure, its measuring range and stress sensitivity increased by nearly 50.3%, 10.6%, respectively. This paper provides a new method to develop micro-opto-electromechanical system (MOEMS) sensors.
| Medienart: |
Artikel |
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| Erscheinungsjahr: |
2016 |
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| Erschienen: |
2016 |
| Enthalten in: |
Zur Gesamtaufnahme - volume:36 |
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| Enthalten in: |
Guang pu xue yu guang pu fen xi = Guang pu - 36(2016), 3 vom: 20. März, Seite 874-9 |
| Sprache: |
Chinesisch |
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| Beteiligte Personen: |
Tang, Jun [VerfasserIn] |
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| Themen: |
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| Anmerkungen: |
Date Completed 15.09.2016 Date Revised 12.07.2016 published: Print Citation Status PubMed-not-MEDLINE |
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| Förderinstitution / Projekttitel: |
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| PPN (Katalog-ID): |
NLM262274671 |
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| LEADER | 01000naa a22002652 4500 | ||
|---|---|---|---|
| 001 | NLM262274671 | ||
| 003 | DE-627 | ||
| 005 | 20231224201415.0 | ||
| 007 | tu | ||
| 008 | 231224s2016 xx ||||| 00| ||chi c | ||
| 028 | 5 | 2 | |a pubmed24n0874.xml |
| 035 | |a (DE-627)NLM262274671 | ||
| 035 | |a (NLM)27400541 | ||
| 040 | |a DE-627 |b ger |c DE-627 |e rakwb | ||
| 041 | |a chi | ||
| 100 | 1 | |a Tang, Jun |e verfasserin |4 aut | |
| 245 | 1 | 0 | |a Study on Strain Detection with Si Based on Bicyclic Cascade Optical Microring Resonator |
| 264 | 1 | |c 2016 | |
| 336 | |a Text |b txt |2 rdacontent | ||
| 337 | |a ohne Hilfsmittel zu benutzen |b n |2 rdamedia | ||
| 338 | |a Band |b nc |2 rdacarrier | ||
| 500 | |a Date Completed 15.09.2016 | ||
| 500 | |a Date Revised 12.07.2016 | ||
| 500 | |a published: Print | ||
| 500 | |a Citation Status PubMed-not-MEDLINE | ||
| 520 | |a Optical micro-ring resonator prepared on Silicon-On-Insulator (SOI) has high sensitivity, small size and low mode volume. Its high sensitivity has been widely applied to the optical information transmission and inertial navigation devices field, while it is rarely applied in the testing of Mechanics. This paper presents a cantilever stress/strain gauge with an optical microring resonator. It is proposed the using of radius change of ring waveguide for the sensing element. When external stress is put on the structure, the radius of the SOI ring waveguide will be subjected to variation, which causes the optical resonant parameters to change. This ultimately leads to a red-shift of resonant spectrum, and shows the excellent characteristics of the structure's stress/strain sensitivity. Designed a bicyclic cascade embedded optical micro-cavity structure, which was prepared by employing MEMS lithography and ICP etching process. The characteristic of stress/strain sensitivity was calculated theoretically. Two values of 0.185 pm x kPa(-1) and 18.04 pm x microstrain(-1) were obtained experimentally, which also was verified by theoretical simulations. Comparing with the single-loop micro-cavity structure, its measuring range and stress sensitivity increased by nearly 50.3%, 10.6%, respectively. This paper provides a new method to develop micro-opto-electromechanical system (MOEMS) sensors | ||
| 650 | 4 | |a English Abstract | |
| 650 | 4 | |a Journal Article | |
| 700 | 1 | |a Lei, Long-hai |e verfasserin |4 aut | |
| 700 | 1 | |a Zhang, Wei |e verfasserin |4 aut | |
| 700 | 1 | |a Zhang, Tian-en |e verfasserin |4 aut | |
| 700 | 1 | |a Xue, Chen-yang |e verfasserin |4 aut | |
| 700 | 1 | |a Zhang, Wen-dong |e verfasserin |4 aut | |
| 700 | 1 | |a Liu, Jun |e verfasserin |4 aut | |
| 773 | 0 | 8 | |i Enthalten in |t Guang pu xue yu guang pu fen xi = Guang pu |d 1997 |g 36(2016), 3 vom: 20. März, Seite 874-9 |w (DE-627)NLM09368360X |x 1000-0593 |7 nnns |
| 773 | 1 | 8 | |g volume:36 |g year:2016 |g number:3 |g day:20 |g month:03 |g pages:874-9 |
| 912 | |a GBV_USEFLAG_A | ||
| 912 | |a GBV_NLM | ||
| 951 | |a AR | ||
| 952 | |d 36 |j 2016 |e 3 |b 20 |c 03 |h 874-9 | ||