Design and fabrication of a novel prism for micro-optical system

This study presents a special k-type (45°, 135°) microprism structure design for the lateral-type semiconductor laser of optical systems. This study combines front- and back-side inclined exposure technology to develop a k-type microprism structure and replaces the optical prism manufactured through traditional machine processing or injection molding with a new polymer (thick-film negative photoresists) micro-optical prism structure. To obtain the optimal structural surface roughness (12-15 nm at 400  μm×400  μm area), the percentage of polymer material loss caused by the solvent was controlled. This roughness level meets Blu-ray specifications (λ/10, λ=405  nm).

Medienart:

E-Artikel

Erscheinungsjahr:

2012

Erschienen:

2012

Enthalten in:

Zur Gesamtaufnahme - volume:51

Enthalten in:

Applied optics - 51(2012), 16 vom: 01. Juni, Seite 3558-63

Sprache:

Englisch

Beteiligte Personen:

Hung, Kuo-Yung [VerfasserIn]
Lee, Chun-Fu [VerfasserIn]
Tsai, Yi-Wei [VerfasserIn]

Links:

Volltext

Themen:

Journal Article

Anmerkungen:

Date Completed 13.09.2012

Date Revised 23.10.2018

published: Print

Citation Status PubMed-not-MEDLINE

doi:

10.1364/AO.51.003558

funding:

Förderinstitution / Projekttitel:

PPN (Katalog-ID):

NLM218601514