一种Zn基有机配位纳米颗粒及其制备方法、光刻胶组合物及其应用
本发明涉及一种Zn基有机配位纳米颗粒及其制备方法、光刻胶组合物及其应用。采用醋酸锌、间甲基苯甲酸以及含氮有机配体在有机溶剂中混合搅拌后进行后处理得到化学通式为[ZnmXn(CH3COO)tYpHq]r的Zn基有机配位纳米颗粒，其中，X为间甲基苯甲酸根，CH3COO表示乙酸根，Y为含氮有机配体，r为聚合度，m、n、p、q、n、r各自独立的选自1～20的任意整数，t选自0～20的任意整数。本发明将Zn基有机配位纳米颗粒作为光刻胶成膜剂，相比于现有光刻胶，制成的光刻胶具有高分辨、高灵敏度、低线条粗糙度的光刻性能。.
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Patent| Erscheinungsjahr: |
2024 |
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| Erschienen: |
2024 |
| Enthalten in: |
Europäisches Patentamt - (2024) vom: 08. März Zur Gesamtaufnahme - year:2024 |
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| Sprache: |
Chinesisch |
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| Links: |
Volltext [kostenfrei] |
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| Anmerkungen: |
Source: www.epo.org (no modifications made), First posted: 2024-03-08, Last update posted on www.tib.eu: 2024-04-08, Last updated: 2024-04-15 |
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| Patentnummer: |
CN117659421 |
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| Förderinstitution / Projekttitel: |
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| PPN (Katalog-ID): |
EPA001084445 |
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| 520 | |a 本发明涉及一种Zn基有机配位纳米颗粒及其制备方法、光刻胶组合物及其应用。采用醋酸锌、间甲基苯甲酸以及含氮有机配体在有机溶剂中混合搅拌后进行后处理得到化学通式为[ZnmXn(CH3COO)tYpHq]r的Zn基有机配位纳米颗粒，其中，X为间甲基苯甲酸根，CH3COO表示乙酸根，Y为含氮有机配体，r为聚合度，m、n、p、q、n、r各自独立的选自1～20的任意整数，t选自0～20的任意整数。本发明将Zn基有机配位纳米颗粒作为光刻胶成膜剂，相比于现有光刻胶，制成的光刻胶具有高分辨、高灵敏度、低线条粗糙度的光刻性能。 | ||
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