Ultraviolet Light-Densified Oxide-Organic Self-Assembled Dielectrics : Processing Thin-Film Transistors at Room Temperature

Low-temperature, solution-processable, high-capacitance, and low-leakage gate dielectrics are of great interest for unconventional electronics. Here, we report a near room temperature ultraviolet densification (UVD) methodology for realizing high-performance organic-inorganic zirconia self-assembled nanodielectrics (UVD-ZrSANDs). These UVD-ZrSAND multilayers are grown from solution in ambient, densified by UV radiation, and characterized by X-ray reflectivity, atomic force microscopy, X-ray photoelectron spectroscopy, and capacitance measurements. The resulting UVD-ZrSAND films exhibit large capacitances of >700 nF/cm2 and low leakage current densities of <10-7 A/cm2, which rival or exceed those synthesized by traditional thermal methods. Both the p-type organic semiconductor pentacene and the n-type metal oxide semiconductor In2O3 were used to investigate UVD-ZrSANDs as the gate dielectric in thin-film transistors, affording mobilities of 0.58 and 26.21 cm2/(V s), respectively, at a low gate voltage of 2 V. These results represent a significant advance in fabricating ultra-thin high-performance dielectrics near room temperature and should facilitate their integration into diverse electronic technologies.

Medienart:

E-Artikel

Erscheinungsjahr:

2021

Erschienen:

2021

Enthalten in:

Zur Gesamtaufnahme - volume:13

Enthalten in:

ACS applied materials & interfaces - 13(2021), 2 vom: 20. Jan., Seite 3445-3453

Sprache:

Englisch

Beteiligte Personen:

Huang, Wei [VerfasserIn]
Yu, Xinge [VerfasserIn]
Zeng, Li [VerfasserIn]
Wang, Binghao [VerfasserIn]
Takai, Atsuro [VerfasserIn]
Di Carlo, Gabriele [VerfasserIn]
Bedzyk, Michael J [VerfasserIn]
Marks, Tobin J [VerfasserIn]
Facchetti, Antonio [VerfasserIn]

Links:

Volltext

Themen:

High-k dielectrics
Journal Article
Low-voltage TFTs
Room temperature oxide film growth
Self-assembled nanodielectrics
Ultraviolet annealing

Anmerkungen:

Date Revised 22.01.2021

published: Print-Electronic

Citation Status PubMed-not-MEDLINE

doi:

10.1021/acsami.0c20345

funding:

Förderinstitution / Projekttitel:

PPN (Katalog-ID):

NLM319799484