Simple autofocusing method by image processing using transmission images for large-scale two-photon lithography

We propose a simple autofocusing technique that can be introduced into conventional two-photon lithography systems without additional devices. Autofocusing is achieved by image processing using transmission images of photopolymerized voxels. The signal-to-noise ratio of transmission images was improved by optimal low-pass filtering to detect voxels in them. The focal point was detected with an accuracy of about 250 nm from the difference images. Further, we demonstrated mass-fabrication of a 5 × 5 spiral square array with an area of 900 × 900 µm2 using this method. The method has potential application in constructing low-cost, compact and versatile two-photon lithography apparatus.

Medienart:

E-Artikel

Erscheinungsjahr:

2020

Erschienen:

2020

Enthalten in:

Zur Gesamtaufnahme - volume:28

Enthalten in:

Optics express - 28(2020), 8 vom: 13. Apr., Seite 12342-12351

Sprache:

Englisch

Beteiligte Personen:

Fujishiro, Yoko [VerfasserIn]
Furukawa, Taichi [VerfasserIn]
Maruo, Shoji [VerfasserIn]

Links:

Volltext

Themen:

Journal Article

Anmerkungen:

Date Revised 14.05.2020

published: Print

Citation Status PubMed-not-MEDLINE

doi:

10.1364/OE.390486

funding:

Förderinstitution / Projekttitel:

PPN (Katalog-ID):

NLM309866987