Durable infrared optical coatings based on pulsed DC-sputtering of hydrogenated amorphous carbon (a-C:H)
Optical properties of low-temperature pulsed DC-sputter deposited ($ {\le} {70° {\rm C}}$≤70°C) hydrogenated carbon are presented. Increasing hydrogen incorporation into the sputter deposited carbon significantly decreases infrared optical absorption due to a decrease in deep absorptive states associated with dangling bonds. Hydrogen flow is optimized (hydrogen flow 3 sccm), achieving the best compromise between increased infrared transmittance and hardness for durable coating performance. Optical, environmental, and durability performance of pulsed DC-sputtered carbon incorporated in multilayer (a-C:H/Ge) infrared antireflective coatings indicates suitability as a durable infrared optical coating for commonly used infrared substrates, including temperature sensitive chalcogenide glass.
Medienart: |
E-Artikel |
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Erscheinungsjahr: |
2020 |
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Erschienen: |
2020 |
Enthalten in: |
Zur Gesamtaufnahme - volume:59 |
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Enthalten in: |
Applied optics - 59(2020), 9 vom: 20. März, Seite 2731-2738 |
Sprache: |
Englisch |
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Beteiligte Personen: |
Gibson, Des [VerfasserIn] |
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Links: |
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Anmerkungen: |
Date Revised 31.03.2020 published: Print Citation Status PubMed-not-MEDLINE |
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doi: |
10.1364/AO.378266 |
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funding: |
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Förderinstitution / Projekttitel: |
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PPN (Katalog-ID): |
NLM308115090 |
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520 | |a Optical properties of low-temperature pulsed DC-sputter deposited ($ {\le} {70° {\rm C}}$≤70°C) hydrogenated carbon are presented. Increasing hydrogen incorporation into the sputter deposited carbon significantly decreases infrared optical absorption due to a decrease in deep absorptive states associated with dangling bonds. Hydrogen flow is optimized (hydrogen flow 3 sccm), achieving the best compromise between increased infrared transmittance and hardness for durable coating performance. Optical, environmental, and durability performance of pulsed DC-sputtered carbon incorporated in multilayer (a-C:H/Ge) infrared antireflective coatings indicates suitability as a durable infrared optical coating for commonly used infrared substrates, including temperature sensitive chalcogenide glass | ||
650 | 4 | |a Journal Article | |
700 | 1 | |a Song, Shigeng |e verfasserin |4 aut | |
700 | 1 | |a Fleming, Lewis |e verfasserin |4 aut | |
700 | 1 | |a Ahmadzadeh, Sam |e verfasserin |4 aut | |
700 | 1 | |a Chu, Hin On |e verfasserin |4 aut | |
700 | 1 | |a Sproules, Stephen |e verfasserin |4 aut | |
700 | 1 | |a Swindell, Ryan |e verfasserin |4 aut | |
700 | 1 | |a Zhang, Xiaoling |e verfasserin |4 aut | |
700 | 1 | |a Navabpour, Parnia |e verfasserin |4 aut | |
700 | 1 | |a Clark, Caspar |e verfasserin |4 aut | |
700 | 1 | |a Bailey, Mark |e verfasserin |4 aut | |
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