Durable infrared optical coatings based on pulsed DC-sputtering of hydrogenated amorphous carbon (a-C:H)

Optical properties of low-temperature pulsed DC-sputter deposited ($ {\le} {70° {\rm C}}$≤70°C) hydrogenated carbon are presented. Increasing hydrogen incorporation into the sputter deposited carbon significantly decreases infrared optical absorption due to a decrease in deep absorptive states associated with dangling bonds. Hydrogen flow is optimized (hydrogen flow 3 sccm), achieving the best compromise between increased infrared transmittance and hardness for durable coating performance. Optical, environmental, and durability performance of pulsed DC-sputtered carbon incorporated in multilayer (a-C:H/Ge) infrared antireflective coatings indicates suitability as a durable infrared optical coating for commonly used infrared substrates, including temperature sensitive chalcogenide glass.

Medienart:

E-Artikel

Erscheinungsjahr:

2020

Erschienen:

2020

Enthalten in:

Zur Gesamtaufnahme - volume:59

Enthalten in:

Applied optics - 59(2020), 9 vom: 20. März, Seite 2731-2738

Sprache:

Englisch

Beteiligte Personen:

Gibson, Des [VerfasserIn]
Song, Shigeng [VerfasserIn]
Fleming, Lewis [VerfasserIn]
Ahmadzadeh, Sam [VerfasserIn]
Chu, Hin On [VerfasserIn]
Sproules, Stephen [VerfasserIn]
Swindell, Ryan [VerfasserIn]
Zhang, Xiaoling [VerfasserIn]
Navabpour, Parnia [VerfasserIn]
Clark, Caspar [VerfasserIn]
Bailey, Mark [VerfasserIn]

Links:

Volltext

Themen:

Journal Article

Anmerkungen:

Date Revised 31.03.2020

published: Print

Citation Status PubMed-not-MEDLINE

doi:

10.1364/AO.378266

funding:

Förderinstitution / Projekttitel:

PPN (Katalog-ID):

NLM308115090